GB/T 28277-2012

Active

Silicon-based MEMS fabrication technology - Measurement method of cutting and pull-press strength of micro bonding area

硅基MEMS制造技术微键合区剪切和拉压强度检测方法

Standard Type

GBT

ICS

31.200

CCS

L55

Status

现行

Issue Date

2012-05-11

Implementation

2012-12-01

Responsible Dept

国家标准委

Drafting Unit

N/A

🔗 Related Standards / 同类标准

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