GB/T 17866-1999

Active

Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems

掩模缺陷检查系统灵敏度分析所用的特制缺陷掩模和评估测量方法准则

Standard Type

GBT

ICS

31.200

CCS

L56

Status

现行

Issue Date

1999-09-13

Implementation

2000-06-01

Responsible Dept

国家标准委

Drafting Unit

N/A

🔗 Related Standards / 同类标准

GB/Z 43510-2023 Integrated circuit TSV 3D package reliability test methods guideline GB/T 4855-1984 Families and products of linear amplifier for semiconductor integrated circuits GB/T 3434-1986 Families and products of ECL circuits for semiconductor integrated circuits GB/T 3431.2-1986 Letter symbols for semiconductor integrated circuits--Letter symbols for function of pins GB/T 6648-1986 Blank detail specification for semiconductor inte-grated circuit static read/write memories GB/T 6814-1986 Families and variety ofsemiconductor integrated non-linear circuits--Variety of analog switch GB/T 6813-1986 Families and variety ofsemiconductor integrated non-linear circuits--Variety of timers GB/T 6815-1986 Families and variety of semiconductor integrated non-linear circuits--Variety of phase-locked loop