Home / Standards / SJ/T 11853-2022 SJ/T 11853-2022 Active 正压悬浮区熔单晶硅炉 Standard Type SJ ICS N/A CCS N/A Status Active Issue Date 2022-10-20 Implementation 2023-01-01 Centralized Committee 工业和信息化部 Issuing Authority 工业和信息化部