Home / Standards / SJ/T 10152-1991 SJ/T 10152-1991 Abolished 集成电路主要工艺设备术语 Standard Type SJ ICS N/A CCS N/A Status Abolished Issue Date 1991-04-02 Implementation 1991-06-30 Centralized Committee 电子工业部 Issuing Authority 电子工业部