GB/T 43894.2-2026

Upcoming

Practice for determining semiconductor wafer near-edge geometry—Part 2: Roll-off amount（ROA）

半导体晶片近边缘几何形态评价第2部分：边缘卷曲法（ROA）

Standard Type

GBT

ICS

77.040

CCS

H21

Status

即将实施

Issue Date

2026-01-28

Implementation

2026-08-01

Responsible Dept

国家标准委

Drafting Unit

N/A

🔗 Related Standards / 同类标准

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