GB/T 43894.1-2024

Active

Practice for determining semiconductor wafer near-edge geometry—Part 1:Measured height data array using a curvature metric（ZDD）

半导体晶片近边缘几何形态评价第1部分：高度径向二阶导数法（ZDD）

Standard Type

GBT

ICS

77.040

CCS

H21

Status

现行

Issue Date

2024-04-25

Implementation

2024-11-01

Responsible Dept

国家标准委

Drafting Unit

N/A

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