GB/T 38614-2020

Active

Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator

基于柔性铰链机构和压电陶瓷驱动器的纳米定位与扫描平台测量方法

Standard Type

GBT

ICS

01.040.39

CCS

N10

Status

现行

Issue Date

2020-04-28

Implementation

2020-11-01

Responsible Dept

工业和信息化部（电子）

Drafting Unit

N/A

🔗 Related Standards / 同类标准

GB/Z 21922-2008 Fundermental terminology and definition of nutritional component in foods GB/Z 41237-2022 Energy internet system—Terms GB/T 2900.33-1993 Electrotechnical terminology--Power electronics GB/T 2900.48-1983 Electrotechnical terminology--Stationary boilers GB/T 12204-1990 Glossary of general terms in metal cutting GB/T 13592-1992 Terms relating to surface analysis GB/T 2900.49-1994 Electrotechnical terminologies--Power system protection GB/T 3187-1994 Reliability and maintainability terms