GB/T 34326-2017

Active

Surface chemical analysis—Depth profiling—Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

表面化学分析深度剖析 AES和XPS深度剖析时离子束对准方法及其束流或束流密度测量方法

Standard Type

GBT

ICS

71.040.40

CCS

G04

Status

现行

Issue Date

2017-09-29

Implementation

2018-08-01

Responsible Dept

中国科学院

Drafting Unit

N/A

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