GB/T 34177-2017

Active

Quartz glass wafer for lithography

光刻用石英玻璃晶圆

Standard Type

GBT

ICS

81.040.30

CCS

Q35

Status

现行

Issue Date

2017-09-07

Implementation

2018-08-01

Responsible Dept

中国建筑材料联合会

Drafting Unit

N/A

🔗 Related Standards / 同类标准

GB/Z 2640-2021 Injection vials made of moulded glass GB/Z 12414-2021 Pharmaceutical glass tube GB/T 4870-1985 Sheet glass dimension series GB/T 903-1987 Colourless optical glass GB/T 7962.7-1987 Colourless optical glass test methods--Examination method for extent of stria GB/T 7962.13-1987 Colourless optical glass test methods--Coefficient of thermal conductivity GB/T 9987-1988 Terms of glass container manufacture GB/T 12416.2-1990 Glass--Hydrolytic resistance ofglass grains at 121℃--Test method and classification