GB/T 32999-2016

Active

Surface chemical analysis—Depth profiling—Measurement of sputtering rate: mesh-replica method using a mechanical stylus profilometer

表面化学分析深度剖析用机械轮廓仪栅网复型法测量溅射速率

Standard Type

GBT

ICS

71.040.40

CCS

G04

Status

现行

Issue Date

2016-10-13

Implementation

2017-09-01

Responsible Dept

中国科学院

Drafting Unit

N/A

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