GB/T 29056-2012

Abolished

Trichlorosilane for silicon epitaxy - Determination of boron，aluminium，phosphorus，vanadium，chrome，manganese，iron，cobalt，nickel，copper，molybdenum，arsenic and antimony content - Inductively coupled plasma mass spectrometric method

硅外延用三氯氢硅化学分析方法硼、铝、磷、钒、铬、锰、铁、钴、镍、铜、钼、砷和锑量的测定电感耦合等离子体质谱法

Standard Type

GBT

ICS

31-030

CCS

L90

Status

废止

Issue Date

2012-12-31

Implementation

2013-10-01

Responsible Dept

国家标准委

Drafting Unit

N/A