GB/T 25755-2010

Active

Vacuum technology - Sputter-ion pumps - Measurement of performance characteristics

真空技术溅射离子泵性能参数的测量

Standard Type

GBT

ICS

23.160

CCS

J78

Status

现行

Issue Date

2010-12-23

Implementation

2011-10-01

Responsible Dept

中国机械工业联合会

Drafting Unit

N/A

🔗 Related Standards / 同类标准

GB/Z 25756-2010 Vacuum technology - Bakable flanges - Dimensions of knife-edge flanges GB/Z 42625-2023 Vacuum technology—Vacuum gauges—Characterization of quadrupole mass spectrometers for partial pressure measurement GB/Z 42624-2023 Vacuum technology—Vacuum gauges—Procedures to measure and report outgassing rates GB/T 3164-1993 Vacuum technology--Graphical symbols GB/T 3163-1993 Terminology for vacuum technology GB/T 11164-1999 Vacuum coating plant generic specification GB/T 18193-2000 Vacuum technology--Mass-spectrometer-type leak detector calibration GB/T 7774-2007 Vacuum technology -Turbomolecular pumps - Measurement of performance characteristics