GB/T 24575-2009

Active

Test method for measuring surface sodium,aluminum,potassium,and iron on silicon and epi substrates by secondary ion mass spectrometry

硅和外延片表面Na、Al、K和Fe的二次离子质谱检测方法

Standard Type

GBT

ICS

29.045

CCS

H80

Status

现行

Issue Date

2009-10-30

Implementation

2010-06-01

Responsible Dept

国家标准委

Drafting Unit

N/A

🔗 Related Standards / 同类标准

GB/T 16596-1996 Specification for establishing a wafer coordinatesystem GB/T 16595-1996 Specification for a universal wafer grid GB/T 12964-2003 Monocrystalline silicon polished wafers GB/T 20230-2006 Indium phosphide single crystal GB/T 20229-2006 Gallium phosphide single crystal GB/T 20228-2006 Gallium arsenide single crystal GB/T 11069-2006 High purity germanium　dioxide GB/T 11094-2007 Horizontal bridgman grown gallium arsenide single　crystal and cutting wafer