GB/T 18735-2002

This standard specifies the general technical requirements, calibration methods, and quality criteria for nanometer-thin standard specimens used in analytical transmission electron microscopy combined with energy-dispersive X-ray spectroscopy (AEM/EDS). It is applied in materials science, nanotechnology, and semiconductor industries to ensure accurate elemental composition and thickness calibration of thin films or nanostructures during quantitative microanalysis. The standard is critical for laboratories performing high-resolution chemical characterization of nanoscale materials, such as nanoparticles, thin coatings, or device layers.