GB/T 16880-1997

Active

Guidelines for photomask defect classification and size definition

光掩模缺陷分类和尺寸定义的准则

Standard Type

GBT

ICS

31.020

CCS

L97

Status

现行

Issue Date

1997-06-20

Implementation

1998-03-01

Responsible Dept

国家标准委

Drafting Unit

N/A

🔗 Related Standards / 同类标准

GB/T 2689.4-1981 Life test and acceleration life test--Optimal linear deflection-free--Evaluation of Weibull distributions GB/T 2689.3-1981 Life test and acceleration life test--Simple linear deflection-free--Evaluation ofWeibull distributions GB/T 2689.2-1981 Life test and acceleration life test charts--Evaluation of their Weibull distributions GB/T 2689.1-1981 Constant stress life tests and acceleration life tests--General rules GB/T 3351-1982 Designations for synthetic quartz crystals GB/T 4965-1985 Classification and designation for getter GB/T 5078-1985 Method for the determination of the space required by capacitors and resistors with unidirectional terminations GB/T 5076-1985 Measurement of the dimensionsof a cylindrical component having two axial terminations