Home / Standards / GB/T 14142-1993 GB/T 14142-1993 Abolished Test method for crystallographic perfection of epit-axial layers in silicon by etching techniques 硅外延层晶体完整性检查方法 腐蚀法 Standard Type GBT ICS N/A CCS H26 Status Abolished Issue Date 1993-02-06 Implementation 1993-10-01 Centralized Committee 国家标准委 Issuing Authority 国家技术监督局