GB/T 11073-2007

Abolished

Standard method for measuring radial resistivity variation on silicon slices

硅片径向电阻率变化的测量方法

Standard Type

GBT

ICS

77.040.01

CCS

H17

Status

废止

Issue Date

2007-09-11

Implementation

2008-02-01

Responsible Dept

国家标准委

Drafting Unit

N/A

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