GB/T 6624-2009

Active

Standard method for measuring the surface quality of polished silicon slices by visual inspection

硅抛光片表面质量目测检验方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A