GB/T 6621-2009

Active

Testing methods for surface flatness of silicon slices

硅片表面平整度测试方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A