GB/T 6620-2009

Active

Test method for measuring warp on silicon slices by noncontact scanning

硅片翘曲度非接触式测试方法

Standard Type
GBT
ICS
29.045
CCS
H82
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A