GB/T 6618-2009

Active

Test method for thickness and total thickness variation of silicon slices

硅片厚度和总厚度变化测试方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A