Home / Standards / GB/T 6617-2009 GB/T 6617-2009 Active Test method for measuring resistivity of silicon wafer using spreading resistance probe 硅片电阻率测定 扩展电阻探针法 Standard Type GBT ICS 29.045 CCS H80 Status 现行 Issue Date 2009-10-30 Implementation 2010-06-01 Responsible Dept 国家标准委 Drafting Unit 国家标准委