GB/T 6616-2023

Active

Test method for resistivity of semiconductor wafers and sheet resistance of semiconductor films—Noncontact eddy-current gauge

半导体晶片电阻率及半导体薄膜薄层电阻的测试 非接触涡流法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2023-08-06
Implementation
2024-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A