GB/T 6616-2009

Abolished

Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge

半导体硅片电阻率及硅薄膜薄层电阻测试方法非接触涡流法

Standard Type

GBT

ICS

29.045

CCS

H80

Status

废止

Issue Date

2009-10-30

Implementation

2010-06-01

Responsible Dept

国家标准委

Drafting Unit

N/A