Home / Standards / GB/T 5226.33-2017 GB/T 5226.33-2017 Active Electrical safety of machinary—Electrical equipment of machines—Part 33: Requirements for semiconductor fabrication equipment 机械电气安全 机械电气设备 第33部分：半导体设备技术条件 Standard Type GBT ICS 29.020 CCS J09 Status 现行 Issue Date 2017-10-14 Implementation 2018-05-01 Responsible Dept 中国机械工业联合会 Drafting Unit N/A