GB/T 47082-2026

Upcoming

Test method for stacking faults of polished monocrystalline silicon carbide wafers

碳化硅单晶抛光片堆垛层错测试方法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
即将实施
Issue Date
2026-01-28
Implementation
2026-08-01
Responsible Dept
国家标准委
Drafting Unit
N/A