GB/T 47073-2026

Upcoming

Surface chemical analysis—Depth profiling—Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering

表面化学分析 深度剖析 中能离子散射术对硅基底上纳米尺度重金属氧化物薄膜的无损深度剖析

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
即将实施
Issue Date
2026-01-28
Implementation
2026-08-01
Responsible Dept
中国科学院
Drafting Unit
N/A