GB/T 46057-2025

Active

Microbeam analysis—Scanning electron microscopy—Method for evaluating critical dimensions by CD-SEM

微束分析 扫描电子显微术 CD-SEM评定关键尺寸的方法

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
现行
Issue Date
2025-08-29
Implementation
2026-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A