GB/T 45826-2025

Active

Titania doped silica glass for lithography

光刻用掺钛石英玻璃

Standard Type
GBT
ICS
81.040.30
CCS
Q35
Status
现行
Issue Date
2025-05-30
Implementation
2025-12-01
Responsible Dept
中国建筑材料联合会
Drafting Unit
N/A