GB/T 44919-2024

Active

Micro-electromechanical systems （MEMS）technology—Bulge test method for measuring mechanical properties of thin films

微机电系统（MEMS）技术 薄膜力学性能的鼓胀试验方法

Standard Type
GBT
ICS
31.080.99
CCS
L59
Status
现行
Issue Date
2024-11-28
Implementation
2024-11-28
Responsible Dept
国家标准委
Drafting Unit
N/A