GB/T 44515-2024

Active

Micro-electromechanical systems (MEMS) technology—Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

微机电系统（MEMS）技术 MEMS压电薄膜机电转换特性测量方法

Standard Type
GBT
ICS
31.080.99
CCS
L59
Status
现行
Issue Date
2024-09-29
Implementation
2025-01-01
Responsible Dept
国家标准委
Drafting Unit
N/A