GB/T 44513-2024

Active

Micro-electromechanical systems (MEMS) technology—Environmental test methods of MEMS piezoelectric thin films for sensor application

微机电系统（MEMS）技术 传感器用MEMS压电薄膜的环境试验方法

Standard Type
GBT
ICS
31.080.99
CCS
L59
Status
现行
Issue Date
2024-09-29
Implementation
2025-01-01
Responsible Dept
国家标准委
Drafting Unit
N/A