GB/T 44375-2024

Active

Requirements for load ports of 300mm semiconductor equipment

300mm半导体设备装载端口要求

Standard Type
GBT
ICS
31.260
CCS
L97
Status
现行
Issue Date
2024-08-23
Implementation
2025-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A