GB/T 43748-2024

Active

Microbeam analysis—Transmission electron microscopy—Method for measuring the thickness of functional thin films in integrated circuit chips

微束分析 透射电子显微术 集成电路芯片中功能薄膜层厚度的测定方法

Standard Type
GBT
ICS
71.040.40
CCS
N 33
Status
现行
Issue Date
2024-03-15
Implementation
2024-10-01
Responsible Dept
国家标准委
Drafting Unit
N/A