GB/T 43661-2024

Active

Surface chemical analysis—Scanning probe microscopy—Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

表面化学分析 扫描探针显微术 用于二维掺杂物成像等用途的电扫描探针显微镜（ESPM，如SSRM和SCM）空间分辨的定义和校准

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
现行
Issue Date
2024-03-15
Implementation
2024-10-01
Responsible Dept
中国科学院
Drafting Unit
N/A