GB/T 43315-2023

Active

Test method for flow pattern defects in silicon wafer—Etching technique

硅片流动图形缺陷的检测 腐蚀法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2023-11-27
Implementation
2024-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A