GB/T 43313-2023

Active

Test method for surface quality and micropipe density of polished silicon carbide wafers—Confocal and differential interferometry optics

碳化硅抛光片表面质量和微管密度的测试 共焦点微分干涉法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2023-11-27
Implementation
2024-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A