GB/T 42902-2023

Active

Test method for surface defects on silicon carbide epitaxial wafers—Laser scattering method

碳化硅外延片表面缺陷的测试 激光散射法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2023-08-06
Implementation
2024-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A