GB/T 42895-2023

Active

Micro-electromechanical systems（MEMS）technology—Bending strength test method for microstructures of silicon based MEMS

微机电系统（MEMS）技术 硅基MEMS微结构弯曲强度试验方法

Standard Type
GBT
ICS
31.200
CCS
L59
Status
现行
Issue Date
2023-08-06
Implementation
2023-12-01
Responsible Dept
国家标准委
Drafting Unit
N/A