GB/T 42720-2023

Active

Electronic specialty gas—Hexachlorodisilane

电子特气 六氯乙硅烷

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
现行
Issue Date
2023-08-06
Implementation
2024-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A