GB/T 42263-2022

Active

Determination of nitrogen content in silicon single crystal—Secondary ion mass spectrometry method

硅单晶中氮含量的测定 二次离子质谱法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
现行
Issue Date
2022-12-30
Implementation
2023-04-01
Responsible Dept
国家标准委
Drafting Unit
N/A