GB/T 42158-2023

Active

Micro-electromechanical systems technology（MEMS） —Description and measurement methods for micro trench and pyramidal needle structures

微机电系统（MEMS）技术 微沟槽和棱锥式针结构的描述和测量方法

Standard Type
GBT
ICS
31.080.99
CCS
L59
Status
现行
Issue Date
2023-03-17
Implementation
2023-07-01
Responsible Dept
国家标准委
Drafting Unit
N/A