GB/T 42106-2022

Active

Nanotechnology—Fabrication of three dimensional nanostructures and devices—A strain method induced by ion beam irradiation

纳米技术 三维纳米结构与器件的加工方法 离子束辐照诱导应变法

Standard Type
GBT
ICS
07.030
CCS
A42
Status
现行
Issue Date
2022-12-30
Implementation
2023-07-01
Responsible Dept
中国科学院
Drafting Unit
N/A