GB/T 41652-2022

Active

Silicon electrode and silicon ring for plasma etching machine

刻蚀机用硅电极及硅环

Standard Type
GBT
ICS
29.045
CCS
H 82
Status
现行
Issue Date
2022-07-11
Implementation
2023-02-01
Responsible Dept
国家标准委
Drafting Unit
N/A