GB/T 41325-2022

Active

Low density crystal originated pit polished monocrystalline silicon wafers for integrated circuit

集成电路用低密度晶体原生凹坑硅单晶抛光片

Standard Type
GBT
ICS
29.045
CCS
H82
Status
现行
Issue Date
2022-03-09
Implementation
2022-10-01
Responsible Dept
国家标准委
Drafting Unit
N/A