GB/T 41153-2021

Active

Determination of boron, aluminum and nitrogen impurity content in silicon carbide single crystal—Secondary ion mass spectrometry

碳化硅单晶中硼、铝、氮杂质含量的测定 二次离子质谱法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
现行
Issue Date
2021-12-31
Implementation
2022-07-01
Responsible Dept
国家标准委
Drafting Unit
N/A