GB/T 40868-2021

Active

Planning and design of controlled environments for research and production at the nanometer scale

纳米尺度科研生产受控环境规划与设计

Standard Type
GBT
ICS
13.040.35
CCS
C70
Status
现行
Issue Date
2021-10-11
Implementation
2022-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A