GB/T 4058-2009

Active

Test method for detection of oxidation induced defects in polished silicon wafers

硅抛光片氧化诱生缺陷的检验方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A