GB/T 40279-2021

Active

Test method for thickness of films on silicon wafer surface—Optical reflection method

硅片表面薄膜厚度的测试 光学反射法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2021-08-20
Implementation
2022-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A