GB/T 40110-2021

Active

Surface chemical analysis—Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

表面化学分析 全反射X射线荧光光谱法（TXRF）测定硅片表面元素污染

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
现行
Issue Date
2021-05-21
Implementation
2021-12-01
Responsible Dept
中国科学院
Drafting Unit
N/A